PINNACLE PLUS+ Series
Process-Proven, Pulsed DC for Single-Magnetron Reactive Sputtering of Thin Dielectric Films.
Description
Pinnacle Plus+ generators deliver DC power in a pulsing configuration enabling reactive sputtering of extremely uniform, high-quality dielectric films.
- Charge clearing during the reverse pulse prevents arcs from developing
- Adjustable process through frequency and duty cycle control
- Compact air-cooled design expandable in primary/secondary configurations
Overview
Advanced Energy Pinnacle® Plus+ power supplies provide all the advantages of a pulsed-DC solution for reactive processes — in an easily integrated package that increases process efficiency, reduces costs, and offers superior flexibility and latitude.
Combining standard DC technology and our patented pulsed-DC technology, the Pinnacle Plus+ power supplies provide higher deposition rates, more repeatable performance, and exceptional film quality compared to complicated and expensive AC-power solutions.
FEATURES
- Adjustable frequency range of 5 to 350 kHz
- Variable duty cycle up to 45%
- Wide voltage range — single-tap wide impedance range
- Superior arc control
- Dual output available for multi-chamber production
