Litmas RPS
Remote Plasma Source and Power Delivery System that Enables Abatement of Exhaust Gasses.
Description
Litmas is an all-in-one remote plasma source combining the power supply, LitmasMatch™ matching network, and plasma chamber into one compact chassis.
Overview
The Litmas® Remote Plasma Source (RPS) system delivers high concentrations of reactive gas species to enable advanced fluorinated gas abatement.
Its small-footprint, high-performance, ease-of-use, and low-cost-of-ownership solutions make it a wise choice for new installations or retrofitting existing systems for abatement.
FEATURES
- Eliminates greenhouse gas emissions
- Provides the highest available plasma power density
- Uses durable SiO2 or Al2O3 chamber materials
- Uses patented LitmasMatch™ solid-state power-delivery topology
- Integrates the power supply, match, and plasma chamber in one package
