NAVIGATOR II matching network
Rapid, Accurate, and Reliable Digitally-Tuned Matching.
Description
The Navigator ll matching network’s advanced digital technology speeds tuning and match response time.
- Leading RF plasma methodology and control
- Advanced pulsing control with tune-while-pulsing capability
- Unprecedented insights into plasma with the integrated Z’Scan II
Overview
The Navigator® ll is equipped with microprocessor-controlled, stepper-motor drives, and advanced tuning algorithms — enabling optimized RF power.
An optional internal Z’Scan® II RF sensor provides real-time analysis of process power and impedance — allowing you to quickly identify and significantly reduce process variability.
Optional Virtual Front Panel software is available for monitoring and control through a user’s computer.
FEATURES
- Digital architecture with model-based rapid tuning algorithms
- Pulsed RF power delivery
- Sweep frequency operation
- Intermodulation distortion (IMD) immunity for multi-frequency applications
- Real-time process power and impedance measurement
